Overview
The VAT F-14-48988-09 is a high vacuum gate valve from VAT’s Series 14 line, designed for high-cycle vacuum isolation applications in semiconductor, laboratory, and industrial processes. Built with all-metal construction using stainless steel sealing surfaces, this valve delivers reliable performance in demanding vacuum environments. The pneumatic actuation system enables rapid open/close cycling, making it ideal for process automation requiring frequent valve operation.
Key Features
- VATLOCK sealing technology—valve is mechanically locked in closed position for enhanced safety and leak-free isolation
- All-metal construction with stainless steel sealing surfaces for UHV compatibility and durability
- Pneumatic actuation for automated vacuum isolation and rapid cycle capability
- Designed for high-cycle applications with extended service life
- Swiss engineering and manufacturing by VAT Vakuumventile AG
Technical Specifications
Specific technical data such as port size, maximum pressure differential, and operating temperature range should be verified against the product datasheet or your equipment documentation. The valve is compatible with standard vacuum flanges and can be configured with various port options (CF, ISO-K, or custom configurations) depending on the specific part designation.
Typical Applications
- Semiconductor and thin-film deposition chambers
- Analytical instrumentation and mass spectrometry systems
- Laboratory vacuum systems and research equipment
- Industrial vacuum processing and outgassing applications
- High-cycle vacuum isolation in automated processes
Compatibility & Replacements
Compatible With
- Pneumatic vacuum pump systems and automated control platforms
- Standard vacuum flanges (CF, ISO-K, and other common port configurations)
- Compressed air supply systems (standard industrial air specifications)
- Vacuum chamber systems requiring high-cycle isolation
Replaces / Drop-In Replacement For
Verify compatibility with your system integrator before ordering. The F-14-48988-09 is a specific configuration of the VAT Series 14 gate valve family. Related model numbers in this series may share mechanical mounting interfaces, but direct replacement should be confirmed with VAT documentation or application engineering.
Works With
- Pneumatic control systems and automation platforms
- Standard industrial compressed air infrastructure
- Vacuum pump controllers and process monitoring equipment
- EtherNet/IP and traditional fieldbus networks (when equipped with control modules)








