Overview
The Veeco FPP-100 four point probe is a standard laboratory tool for non-destructive measurement of resistivity and sheet resistance in semiconductor process control, materials research, and quality assurance. The device features a four-point contact geometry that delivers accurate measurements while minimizing errors from probe resistance and contact impedance. Its digital readout display provides direct reading of voltage, current, sheet resistance, slice resistivity, and material type.
Key Features
- Four-point probe head geometry for precise resistivity and sheet resistance measurement
- Digital readout display with multiple measurement modes (sheet resistance, slice resistivity, V/I, material typing)
- 170V penetration voltage to break through thin insulating surface layers
- Compatible with standard wafer platens and alignment systems
- Fully functional, refurbished condition with factory specifications intact
Technical Specifications
- Probe Configuration: Four-point linear or square array with tungsten carbide needles
- Penetration Voltage: 170V pulse capability
- Measurement Modes: Sheet resistance, slice resistivity, V/I readout, material type test
- Display: Digital LED/LCD readout
- Wafer Compatibility: Up to 6-inch wafers
- Probe Head Material: Tungsten carbide tips with jeweled needle guides
- Typical Spacing: 1.00mm, 1.27mm, or 1.591mm (needle to needle)
- Application: Semiconductor resistivity testing, thin-film characterization, quality control
Typical Applications
- Semiconductor wafer resistivity and doping profile measurement
- Thin-film sheet resistance characterization
- Integrated circuit fabrication process control and monitoring
- Materials research and development (resistivity verification)
- Quality assurance in wafer production and device manufacturing
- Laboratory and fab-floor resistivity testing (1 cm × 1 cm minimum sample size recommended)
Compatibility & Replacements
Compatible With
- Alessi Industries probe systems and equipment
- GRQ Instruments four-point probe setups
- Standard semiconductor fab wafer platens and alignment chucks
- Jandel Compact probe heads (drop-in compatible)
- Square-bodied probe head assemblies
Replaces / Drop-In Replacement For
- Veeco FPP-100 models (direct replacement)
- Alessi Industries square-bodied probe heads
- Earlier four-point probe configurations in legacy fab systems
Works With
- Wafer handling and alignment equipment from Veeco and compatible OEMs
- Standard laboratory and fab-floor power supply systems (operates on 110V/220V input)
- Manual or automated wafer positioners and probe stage adapters
- Data logging and measurement software compatible with serial output (if equipped)
